1.53νm photo-and electroluminescence from Er3+ in erbium silicate

Yang Yin,Kai Sun,Wanjin Xu,Guangzhao Ran,Guogang Qin,Shumao Wang,Chaoqun Wang
DOI: https://doi.org/10.1088/0953-8984/21/1/012204
2009-01-01
Abstract:Si-rich silicon oxide (SRO)/Er-Si-O/SRO multilayers were prepared on p-Si substrates using magnetron sputtering. X-ray diffraction measurements indicate that a mixture of silicates Er2Si2O7 and Er2SiO5 was formed after the multilayers were annealed at 1000 and 1150 degrees C. Strong Er3+ 1.53 mu m photoluminescence (PL) at room temperature has been observed from these multilayers and the full width at half-maximum of the 1.53 mu m peak is less than 1.8 nm for the multilayers annealed at 1150. C. Er3+ 1.53 mu m electroluminescence has been observed from erbium silicate films for the first time.
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