Dependence of 1.54 Mu M Photoluminescence on Excess-Si Degrees of Er-Doped Si-Rich Sio2 Films Deposited by Magnetron Sputtering

GZ Ran,Y Chen,ZC Ma,WH Zong,LQ Xie,CG Guo,GC Qin
DOI: https://doi.org/10.3321/j.issn:0256-307x.2001.07.047
2001-01-01
Abstract:Room-temperature 1.54 mum photoluminescence (PL) is observed from Er-doped Si-rich SiO2 (SiO2:Si:Er) films deposited by using the magnetron sputtering technique. To determine the optimum Si content in the SiO2:Si:Er films, the percentage area of the Si target in the composite SiO2-Si-Er target was changed from 0, to 10%, 20% and 30%. The percentage area of the Er target was fixed at 1%. It is found that the optimum annealing temperatures for Er3+ luminescence intensities are 900 degreesC for the SiO2:Er film and 900, 800 and 700 degreesC for the SiO2:Si:Er films containing 10%, 20% and 30% excess-Si (percentage areas of Si target), respectively The SiO2:Si:Er film containing 20% excess-Si and annealed at 800 degrees C has the most intense FL.
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