Room-temperature Er3+1. 54 Tμm Electroluminescence from SiO2 : Er Films and Six O2 :Er Films

袁放成,冉广照,陈源,戴伦,乔永平,张伯蕊,秦国刚,马振昌,宗婉华
DOI: https://doi.org/10.3969/j.issn.1000-3819.2002.04.029
2002-01-01
Abstract:Er doped SiO 2(SiO 2:Er)films and Er doped Si x O 2(Si x O 2:Er, x 1)films were deposited on n + Si substrate by magnetron sputtering technique. After these films were annealed at proper temperatures, the electrodes were evaporated on the front and back, respectively, of SiO 2/n + Si samples and Si x O 2/n + Si samples, thus light emitting diodes(LEDs) were fabricated. The LEDs emitted 1.54 μm wavelength light from Er 3+ under the reverse biases higher than 4 V at room temperature. The Er 3+ 1.54 μm electroluminescence(EL) intensity from Si x O 2/n + Si LEDs was more intense than that of SiO 2/n + Si LEDs. And that intensity depends on annealing temperature of SiO 2/n + Si samples and Si x O 2/n + Si samples.
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