Synthesis Of Er3+ Doped Silicon Based Light Emitting Material By Sol Gel Method

DaTao Xie,Xiaogang Wang,Yizhuang Xu,Jinguang Wu.,Guangxian Xu
DOI: https://doi.org/10.1117/12.382871
2000-01-01
Abstract:We suggested a new synthesis process, the sol-gel method, to incorporate high concentration of Er3+ ions into the silicate film on silicon substrate. The coating solutions with uniformly dispersed metal ions were prepared from Er(NO)(3) solution, Si(OC2H5)(4) and ethanol. Spin coating was carried out onto a treated mono-crystalline silicon (100) substrate, at a speed of about 4000-rpm for 8s. The precursor films were annealed in air at 500 degrees C for 2 hours. Er-related similar to 1.54 mu m photoluminescence was observed at room temperature. The optimal doped concentrations of Er3+ in SiO2 film was estimated at about similar to 10(21)/cm(3). Through characterizations of AFM, FTIR, DTA, TG and EXAFS, we found that: the synthesized film is compact and smooth in microscope; 500 degrees C annealing is enough to perform the structure change of gel to glass; and, the Er-O formed complex with coordinate number of 9. Because of the formation of Er-O complex, Er-O-Si can form the net structure in the synthesized film. The configuration could not only increase the optical activity of ions, but also improve the homogenous of Er3+ ions in SiO2. Thus we demonstrated the sol-gel process is an efficient way to overcome the quench effect of concentration and increase the distribution quality.
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