Abstract:In this work we report on lead zirconate titanate (PZT) ferroelectric nanestructures fabricated by dip-coating process on silicon substrates covered by nano-porous alumina membranes with pore sizes of 20 nm-100 nm served as templates. Microstructures of the PZT ferroelectric nanostructures were examined by scanning transmission electron microscopy (STEM) with both planar and cross-sectional samples. Cross-sectional TEM images, in conjunction with energy dispersive X-ray elemental analyses revealed the presence of isolated ferroelectric nanastructures imposed by the membrane interiors. Lateral dimensions of the PZT nanostructures can be controlled by the nano-pore sizes of the used alumina membranes. The nano-pores of the alumina membranes were fully penetrated by PZT solution via dip-coating technique, and their interiors were conformally coated by the PZT material with a coating thickness of 4nm-15nm. That was confirmed by the observed lines with dark TEM contrast within the nano-pores. PZT material exists in the manner of continuous medium and/or discrete grains in the channels of nano-pores. Planar STEM images demonstrated that the PZT nanostructures had an oval shape morphology, which was caused by either a local deformation of the nano-pores or shrinkage of PZT solution during the post-annealing process. The ordered FZT nanestructures with a conformal coating thickness of 4 nm-15nm fabricated on Si substrates by dip-coating process, have promising applications in the future, non-volatile ferroelectric random access memories with 3-dimensional structures.

Study on Chemical-Etching of Lead Zirconate Titanate Thin Films

Study on Wet-etching of PZT Thin Films

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Study on Wet-Etching of PZT Thin Film

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Study of Fabrication and Etching Processes of PZT Thin Films on Silicon

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Effect of Wet Etching on Properties of Lead Zirconium Titanate During Integration Process

Study on PZFNT Ferroelectric Thin Films by RF Magnetron Sputtering

Reactive Ion Etching And Ion Beam Etching For Ferroelectric Memories

Ferroelectric Nanostructures Fabricated by Dip-Coating Process and Microstructural Characterization by Scanning Transmission Electron Microscopy

Fabrication of Silicon-Based PZT Films and Process-Induced Damage Problems

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One-Step Mask Etching Strategy Toward Ordered Ferroelectric Pb(Zr 0.52 Ti 0.48 )O 3 Nanodot Arrays

Research of Spray Etching of PZT Film

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