Abstract:High-quality lead zirconate titanate (PZT) thick films have been prepared on silicon substrates by combining PZT-Si bonding and wet-etching technology. The bulk PZT wafer was first bonded to the silicon substrate using a 2 mu m thick intermediate layer of epoxy resin with a bonding strength higher than 10 MPa. Then the bulk PZT was thinned by a wet-etching method. The thickness of the final PZT films depends on the etching time. The PZT thick films after being polished showed a surface roughness of about 20 nm (RMS), which can satisfy most of the requirements in MEMS. The prepared PZT thick films show a dielectric constant as high as 2400 below 100 kHz, remnant polarization of 13 mu C cm(-2), piezoelectric constant d(31) of about -280 pm V-1 and Young's modulus of about 63 GPa. The measured electromechanical properties of the PZT thick films were comparable to those of the corresponding bulk ceramics. This approach makes it possible to obtain high-quality PZT films because it separates the PZT wafer fabrication from the target substrate and consequently allows integration of the PZT thick films onto many kinds of substrates. Finally, a self-sensing bulk PZT thick film actuator was fabricated as an example of a basic PZT-Si diaphragm structure that can be used in piezoelectric micropumps, and its sensing and actuating performances were also demonstrated.

Research of Spray Etching of PZT Film

Spray Wet Etching Process for Preparing PZT Thick-Film

Study on Wet-etching of PZT Thin Films

A Novel Wet Etching Process of Pb(Zr,Ti)O-3 Thin Films for Applications in Microelectromechanical System

Study on Wet-Etching of PZT Thin Film

A Two-step Wet Etching Process of PZT Thin Film With Ultra-low Undercut for MEMS Applications

Fabrication And Etching Processes Of Silicon-Based Pzt Thin Films

Study of Fabrication and Etching Processes of PZT Thin Films on Silicon

Advances of PZT Ferroelectric Thin Films in Etching Techniques

Micro-patterning of PZT Thick Film by Lift-off Using ZnO As a Sacrificial Layer

Study on fabrication precision of PZT thin film micro pattern

Fabrication of PZT microdevices using a high-yield sol-gel process

Preparation of Thick PZT Film by Electrostatic Spray Deposition (ESD) for the Application in Micro-System Technology

Preparation of A High-Quality Pzt Thick Film with Performance Comparable to Those of Bulk Materials for Applications in Mems

Preparation and Etching of Silicon-Based Piezoelectric Thin Films for Integrated Devices

Study on Micro-patterning of Vibration Pickup Device Based on PZT Thick Films

PZT Film and Si Substrate Two-Layer System Patterning Morphology by Femtosecond Pulsed Laser

Wet Chemical Etching of Lead Zirconate Titanate Thin Film for Microelectromechanical Systems Applications

Study on Wet-etching of ITO Thin Films Based on PLZT

Deposition and Patterning Technique for Realization of PZT Thick Film Micro Actuator

Patterning PZT Thin Films using Reactive Ion Beam Etching for PiezoMEMS, RF MEMS Resonator and Filter Applications