Influence of Nano-Embossing on Properties of Pb(Zr-0.3,Ti-0.7)O-3 Ferroelectric Thin Film

Zhenkui Shen,Zhihui Chen,Jiangrong Fang,Bingrui Lu,Zhijun Qiu,Anquan Jiang,Yifang Chen,Xinping Qu,Ran Liu
DOI: https://doi.org/10.1109/inec.2010.5425090
2010-01-01
Abstract:In this work, we apply nano-embossing technology to fabricate Pb(Zr-0.3,Ti-0.7)O-3 (PZT) ferroelectric thin film nanostructures and investigate the influence of the patterning process on the material and ferroelectric properties by using SEM. XRD and Precision Ferroelectric Tester. Embossing process has been optimized for embossing depth and pattern profile. It was found that embossing will result in (100) preferred orientation of the PZT thin film. The electrical characteristics of patterned and unpatterned PZT films have been also studied for comparison.
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