Influence of Nano-Embossing on Properties of Poly(vdf-Trfe)

Jiang-Rong Fang,Xiao-Ya Luo,Zhen Ma,Zhen-Kui Shen,Qian Lu,Bing-Rui Lu,Guo-Dong Zhu,Xin-Ping Qu,Ran Liu,Yi-Fang Chen
DOI: https://doi.org/10.1016/j.mee.2009.12.026
IF: 2.3
2010-01-01
Microelectronic Engineering
Abstract:Poly(vinylidene fluoride-trifluoroethylene), P(VDF-TrFE), copolymer films nanostructures are attracting increasing interests for potential applications in FERAM, NEMS and sensors. In this work we apply hot embossing lithography to fabricate P(VDF-TrFE) copolymer nanostructures and investigate the influence of this patterning process on the material and electrical properties by using AFM, XRD, FTIR and Precision Ferroelectric Tester. It was found that nano-embossing technique offers not only a low-cost and effective way to fabricate nanoscale structures but also a way to control the orientation and crystal quality of P(VDF-TrFE) films. The electrical measurement also indicated superior ferroelectric characteristics for the imprinted structure to the un-imprinted area of P(VDF-TrFE) films.
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