Nanoscale control of domain arrangements in Pb(Zr0.3,Ti0.7)O3 ferroelectric films

Zhen-Kui Shen,Qian Lu,Zhi-Hui Chen,An-Quan Jiang,Zhi-Jun Qiu,Xin-Ping Qu,Yi-Fang Chen,Ran Liu
DOI: https://doi.org/10.1016/j.mee.2010.12.101
IF: 2.3
2011-01-01
Microelectronic Engineering
Abstract:Arrays of ferroelectric PZT nanostructures with lateral size down to 500nm were fabricated using nanoembossing technique. The static distribution of domain configurations was investigated by Piezoresponse Force Microscopy (PFM). The observed presence of patterned domains following the patterned morphology suggests that nanoembossing could be used as a potential method for nanoscale control of domain arrangements in ferroelectrics nanostructures.
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