Growth and Electric Characteristics of p-Type N-Doped ZnO Film by Metal-Organic Chemical Vapor Deposition

Tang Kun,Gu Shulin,Zhu Shunming
2008-01-01
Abstract:The relative low-resistance nitrogen-doped ZnO thin film was realized by metal-organic chemical vapor deposition through modifying the ratio of O2 and N2O,and put them together into the reaction chamber.The influence of changing the ratio of O2 and N2O and the substrate temperature to the electric characteristics of the thin film were investigated.Then comparison of Raman and Hall were used to analyze the effect of the unintentional impurity carbon which usually exists in MOCVD fabricated films.The results and discussions provide a route on solving the world-wide difficult problem of p-type doping in ZnO.
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