Electrical Properties of Al+N Co-doped p-type ZnO Films

张正海,叶志镇,朱丽萍,赵炳辉,诸葛飞,吕建国
DOI: https://doi.org/10.3969/j.issn.1672-7126.2004.06.003
2004-01-01
Abstract:Electrical properties of Al + N co-doped p-type ZnO, grown by DC reactive sputtering in N2O-O2 atmosphere, have been studied. Results indicate that the co-doped p-type ZnO films deposited at the substrate temperature of 500°C have the highest carrier density, about three orders higher than that of N doped p-type films. Moreover, influence of N2O partial pressure ratio on electrical properties of the as-grown ZnO films was discussed. The p-type ZnO grown in the ambient of pure N2O shows the highest carrier concentration of 7.56 × 1017 cm-3, but the lowest mobility of 0.09 cm2V-1s-1 at the substrate temperature of 500°C.
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