Abstract:Abstract High-precision micro/nano probe plays an increasingly important role in manufacturing and measurement. The multi-arm elastic mechanism that can produce deformation under the contact force is widely used in the design of probe. The striking feature of this mechanism is that multiple variables are coupled to each other and are not easily separated. However, the transfer matrix of probe, rather than a multivariable decoupling model, is widely used as a measurement model in traditional research. Transfer matrix appears as a “black box” and does not reveal working principles of probe. Our previous research proposed a 3D decoupling model. The 3D model presents the coupling relationship between input and output variables, and also finishes a theoretical explanation of complex features of 3D probe. Recent studies have found that this decoupling model has practical value in parameter and shape optimization of probe. As the optimized purpose, two indicators — sensitivity and compliance (reciprocal of stiffness) are proposed from the model. The increased sensitivity means the probe has a lower resolution requirement for the capacitive sensor used. High compliance of probe means small contact force between the stylus ball and workpiece. Excessive stiffness can cause excessive contact forces that damages surface of workpiece. Combined with theoretical model and finite element analysis (FEA), the key parameters affecting sensitivity and compliance of probe are extracted, and a new optimized elastic mechanism based on an original Hexflex mechanism. The new optimized probe has better performance with sensitivity, input compliance, output compliance increased by 78.6%, 48.4%, 157.7%, respectively.

Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines

The Parameters Design and Analysis of Micro-nano CMM Probe

On-line Qualification of a Micro Probing System for Precision Length Measurement of Micro-Features on Precision Parts

Design of A Large-Scanning-Range Contact Probe for Nano-Coordinate Measurement Machines

Micro/nano Scale Mechanical Tests Based on the Probe Platform

An Optimized 3D Probe Using Sensitivity and Compliance Analysis

Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics

Development of a High-Precision Multifunctional Probe for Measuring Microstructures

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

Design and Fabrication of a Micro-Capacitor for Nano Probing System

Probe System Design for Three Dimensional Micro/nano Scratching Machine

Kinematic Analysis and Optimal Design of a 3D Compliant Probe

Structure Design and Optimization of MEMS Micro Tactile Probe for NMM

Probe Experimental Mechanics

Development of MEMS-based Micro Capacitive Tactile Probe

Efficient Calibration of a Scanning Probe on CMM

An Optical Probe Stage and Its Applications in Mechanical Behavior Measurements of Micro-Objects and Thin Films

Scanning test platform based on MEMS micro tactile probe and nanomeasuring machine

Development and Calibration of a Compact Self-Sensing Atomic Force Microscope Head for Micro-Nano Characterization

An Efficient Calibration Method for 3D Nonlinear and Nonorthogonal Scanning Probe in Cylindrical CMM

Dynamic errors analysis of CMM touch trigger probes