Development of a High-Precision Multifunctional Probe for Measuring Microstructures

Rui-Jun Li,Jie Zheng,Kai Kang,Xiao-Yu Cai,Biao Wang,Qiao-Sheng Pan,Kuang-Chao Fan

DOI: https://doi.org/10.1109/jsen.2021.3054965

IF: 4.3

2021-04-01

IEEE Sensors Journal

Abstract:An increasing number of micro/nano-components with complex structures have emerged in recent years. Different kinds of feature sizes usually exist in a single component and require the use of instruments with nanometer-level accuracy. The traditional types of equipment cannot meet the current demands because of their lack of function and effectiveness. In this study, a multifunctional probe is designed by combining the interference and focusing principles. The Linnik principle is adopted in the interferometry module for its high vertical resolution and large horizontal range and its ability to measure surface topography. The focusing module modified from a Blue-ray DVD pickup head has a high horizontal resolution and a large vertical range suitable for measuring step height and line/groove width. The two modules share a polarizing beam splitter and an objective lens to reduce probe size. Then, the probe is manufactured, calibrated, and verified by measuring the surface topography with a reference height of 100 nm, a step height of approximately $4~mu text{m}$ , and a diameter of approximately $25~mu text{m}$ . The proposed probe has a high resolution and large range in 3D and can measure high-precision components with multiple features.

engineering, electrical & electronic,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the insufficiency and inefficiency of current traditional measurement devices when facing micro - and nano - components with complex structures. These components usually contain multiple feature sizes and need to be measured with instruments having nano - scale precision. However, due to their single function and low efficiency, traditional devices cannot meet the current requirements. Therefore, this research has designed a high - precision multi - function probe that combines the principles of interference and focusing, aiming to achieve multi - feature measurement of the micro - structure surface topography, step height, and line width / groove width, so as to improve the measurement precision and efficiency.

Specifically, this multi - function probe solves the above problems in the following ways:
- **Interference module**: Adopting the Linnik interference principle for measuring the surface topography. This module has a high vertical resolution and a large horizontal measurement range and is able to measure the surface topography.
- **Focusing module**: Modified based on the blue - ray DVD pickup head, it has a high horizontal resolution and a large vertical measurement range and is suitable for measuring step height and line width / groove width.
- **Shared components**: The two modules share a polarizing beam splitter and an objective lens to reduce the volume of the probe.

Through this design, this multi - function probe can achieve multi - feature measurement with a large range (100 μm × 100 μm × 6 μm) and nano - scale resolution in three - dimensional space, thus meeting the measurement requirements of complex components in modern ultra - precision machining and semiconductor technology.