Abstract:Non-destructive tests working at lower microwave frequencies have large advantages of dielectric material penetrability, lower equipment cost, and lower implementation complexity. However, the resolution will become worse as the work frequencies become lower. Relying on designing the structure of high field confinement, this study realizes a simple complementary spiral resonators (CSRs)-based near-field probe for microwave non-destructive testing (NDT) and imaging around 390 MHz (λ = 769 mm) whereby very high resolution (λ/308, 2.5 mm) is achieved. By applying an ingenious structure where a short microstrip is connected to a microstrip ring to feed the CSR, the probe, that is a single-port microwave planar circuit, does not need any extra matching circuits, which has more application potential in sensor arraying compared with other microwave probes. The variation of the electric field distribution with the standoff distance (SOD) between the material under test and the probe are analyzed to reveal the operation mechanisms behind the improved sensitivity and resolution of the proposed probe. Besides, the detection abilities of the tiny defects in metal and non-metal materials are demonstrated by the related experiments. The smallest detectable crack and via in the non-metal materials and the metal materials are of a λ/1538 (0.5 mm) width, a λ/513 (1.5 mm) diameter, a λ/3846 (0.2 mm) width and a λ/513 (1.5 mm) diameter, respectively. Moreover, to further evaluate the performance of the proposed probe, the defects under skin layer in the multilayer composite materials and the defects under corrosion in the carbon steel are inspected and imaged. Due to lower work frequency, high resolution, outstanding detection abilities of tiny defects, and large potentials in sensor arraying, the proposed probe would be a good candidate for microwave NDT and imaging.

Design and fabrication of a novel silicon probe for micromachined surface profilers

Fabrication and testing of a novel silicon probe for micromachined surface profilers.

Silicon probe for micromachined surface profilers

Design and Fabrication of a Silicon Probe for Surface Profilers

High Quality-Factor Quartz Tuning Fork Glass Probe Used In Tapping Mode Atomic Force Microscopy For Surface Profile Measurement

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Fabrication of a microscopic four-point probe and its application to local conductivity measurement

Profile Measurements of Micro-Aspheric Surfaces Using an Air-Bearing Stylus with A Microprobe

Development of a New Microscopic Four-Point AFM Probe for the Measurement of Local Electrical Conductivity

A micromachined silicon resonant accelerometer

Development of a High-Precision Multifunctional Probe for Measuring Microstructures

A Wideband and High Sensitivity Probe Design for Near-Field Scanning

Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics

A micromachined resonant accelerometer

Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe

Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator

Application of calibrated and reusable probes on a home-made scanning probe microscope platform

Design, Analysis, and System-Level Simulation of A Micromachined Resonant Charge Sensor with Microleverage Mechanisms

Very high frequency probes for atomic force microscopy with silicon optomechanics

A Simple High-resolution Near-field Probe for Microwave Non-Destructive Test and Imaging