Abstract:To overcome the shortcomings of limited range and low measurement speed in current scanning probe microscope(SPM),a large range scanning microscope for fast,high accurate and traceable nano measurement and metrology is proposed,which combines the fast optical confocal microscope and SPM.A large range nano-positioning system used as scanning stage in this microscope is implemented,which consists of two stages:a coarse stage driven by servo motors in two dimensions and a flexible-hinge fine stage driven by PZT actuators in three dimensions.A dual-servo control mechanism is designed for motion control and a laser interferometric measurement system is established for feedback and traceability.To remove the noise components,this system employs a digital Chebyshev filter,which reduces the noise level by 85%.Experimental results show that this system has the positioning accuracy better than 5 nm and the resolution better than 2 nm.

Development of Large Range Nano-Positioning System Used in Metrological Scanning Microscope