Nanoprecision Measurement of High-Aspect-Ratio Microholes Using Sub-100-μm Tungsten Ball Tip
Ya-Xiong He,Rong-Wei Lin,Jie Li,Rui-Jun Li,Pan Yao,Zhen-Ying Cheng,Qiang-Xian Huang,Kuang-Chao Fan
DOI: https://doi.org/10.1109/jsen.2023.3330394
IF: 4.3
2023-12-16
IEEE Sensors Journal
Abstract:Microholes with diameters less than and aspect ratios larger than 5:1 are widely used in industrial production. To measure the inner wall of these structures with nanometer accuracy, this study proposed and implemented a method using a self-developed micro coordinate-measuring machine equipped with a tungsten probe stylus. The probe stylus has a sphere diameter of approximately , which makes it suitable for vertical insertion into the microholes. The self-fabricated tungsten probe tip's radius error was measured and corrected using a ruby standard sphere. The tungsten probe stylus was fixed to the probe's elastic mechanism and then inserted into the microhole's interior through a vision-aided guidance system. Eight points uniformly distributed on the cross Section at different heights were measured, and the coordinates of the points were fit into a circular equation using the least-squares method. The measured diameter and roundness error were obtained from the fit equations. The experimental results show that the measurement uncertainties of the diameter and roundness error measurement are 192 and 226 nm ( = 2), respectively. This method can provide nanometer accurate measurements of the internal dimensions of microholes and microgrooves, as well as the dimensional and morphological characteristics of their inner walls. Equipped with a needle-tip probe, it can also be used to measure the roughness of the inner wall of microstructures.
engineering, electrical & electronic,instruments & instrumentation,physics, applied