Three-Dimensional Nano Measurement System Based on Resonant Trigger Probe
Qiangxian Huang,Jian Xu,Xianzhi Qin,Liansheng Zhang,Rongjun Cheng,Hongli Li,Chaoqun Wang,Ruijun Li
DOI: https://doi.org/10.1109/tim.2024.3381248
IF: 5.6
2024-04-05
IEEE Transactions on Instrumentation and Measurement
Abstract:To deal with the higher demands of ultraprecision manufacturing on the force, accuracy, and probe size of the measurement instruments, a novel 3-D nano measurement system is developed with extremely low measuring force, high accuracy, and the capability of measuring complex structures. The highly force-sensitive resonant probe in the system can be triggered based on interatomic forces. Therefore, the measuring force of the system is extremely low. An integrated probe tip was fabricated based on the arc melting method, which consists of an tip ball and a length of 2 mm stem. Even internal features of tens of microns can also be profiled by the system. Results of the performance tests show that the trigger resolution of the system is 0.45, 0.40, and 0.41 nm in the X-, Y-, and Z-directions, respectively. The repeatability error is better than 16 nm in all three directions. The measuring force is (X), (Y), and (Z). In the applied research experiment, the developed system was successfully used to measure the inverted conical hole of a fuel injection nozzle. This complex and difficult-to-measure microstructure is designed with a diameter of and a conical angle of 1.53° ± 0.12°. The experimental results verify the exceptional performance of the developed system in achieving low-force, high-precision measurements on minute structures.
engineering, electrical & electronic,instruments & instrumentation