Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

Micro/nano Scale Mechanical Tests Based on the Probe Platform

Measurement of mechanical properties of one-dimensional nanostructures with combined multi-probe platform

On-line Qualification of a Micro Probing System for Precision Length Measurement of Micro-Features on Precision Parts

An Optical Probe Stage and Its Applications in Mechanical Behavior Measurements of Micro-Objects and Thin Films

PROGRESS OF MICRO AND NANO SOLID EXPERIMENTAL MECHANICS BASED ON THE OPTICAL AND THE PROBE TECHNIQUES

Probe Experimental Mechanics

Design and Verification of Micro/Nano-Probes for Coordinate Measuring Machines

Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

A novel technique of microforce sensing and loading

A Probe-Based Nanometric Morphology Measurement System Using Intermittent-Contact Mode

Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System

Scanning test platform based on MEMS micro tactile probe and nanomeasuring machine

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

Design and Application of the Dynamic Detection Platform for Testing the Micromechanical Properties of Agricultural Products

Coupling Effect in Microscale Mechanical Test

An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending

The Observation of Interface Effects Presented on Micrometer-Scale Sphere Tips of Fiber Bragg Grating-Based Probes

Mechanical Characterization Device For In Situ Measurement Of Nanomechanical Properties Of Micro/Nanostructures

Measurement of Micro-scale Experimental Mechanics Based on Stage of Optical and Scanning Microscopes

Recent Developments in Testing Techniques for Elastic Mechanical Properties of 1-D Nanomaterials.