Scanning test platform based on MEMS micro tactile probe and nanomeasuring machine

Yuan Li,Weibing Sun,Li Shao,Xing Fu,Dachao Li,Xiaotang Hu
DOI: https://doi.org/10.19650/j.cnki.cjsi.2009.03.025
2009-01-01
Abstract:To improve the precision and resolution in scanning measurement of micro structures and devices, the integration of nanomeasuring machine and micro MEMS tactile probe is used to construct high performance scanning test platform. The measurement principle of micro tactile probe is introduced, the probe feedback control in nanomeasuring machine is studied, and the calibration method of the control conversion parameters is also studied. Meanwhile, the influence of different scanning modes on the platform is discussed. The scanning experiments on smooth and non-smooth surfaces were carried out. Results show that the standard deviations of the scanning difference value for trace and retrace scannings on smooth and non-smooth surfaces are 15.519 nm and 23.088 nm respectively, and high measurement repeatability is achieved.
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