Abstract:Current flexible/compliant tactile sensors suffer from low sensitivity and high hysteresis introduced by the essential viscosity characteristic of soft material, either used as compliant sensing element or as flexible coverage. To overcome these disadvantages, this paper focuses on developing a tactile sensor with a smart hybrid structure to obtain comprehensive properties in terms of size, compliance, robustness and pressure sensing ability so as to meet the requirements of limited space applications such as prosthetic fingertips. Employing micro-fabricated tiny silicon-based pressure die as the sensing element, it is easy to have both small size and good mechanical performance. To protect it from potential damage and maintain the compliant surface, a rigid base and a soft layer form a sealed chamber and encapsulate the fixed die together with fluid. The fluid serves as highly efficient pressure propagation media of mechanical stimulus from the compliant skin to the pressure die without any hazard impacting the vulnerable connecting wires. To understand the pressure transmission mechanism, a simplified and concise analytic model of a spring system is proposed. Using easy fabrication technologies, a prototype of a 3 x 3 sensor array with total dimensions of 14mm x 14mm x 6.5mm was developed. Based on the quasi-linear relationship between fluid volume and pressure, finite element modeling was developed to analyze the chamber deformation and pressure output of the sensor cell. Experimental tests of the sensor prototype were implemented. The results showed that the sensor cell had good sensing performance with sensitivity of 19.9 mV N-1, linearity of 0.998, repeatability error of 3.41%, and hysteresis error of 3.34%. The force sensing range was from 5 mN to 1.6 N.

An Optimized 3D Probe Using Sensitivity and Compliance Analysis

A Compliant Three-Axis Force Sensor with Solid–Liquid Hybrid Cover for Prosthetic Fingertip

Research on a two-dimension micromanipulator with no displacement and little concentrated stress parasite

Dynamic Confocal Optical Probe Based on Time Difference Measurement

Three-Dimensional Finite Element Analysis of a Novel Silicon Based Tactile Sensor with Elastic Cover.

Smart structure with elastomeric contact surface for prosthetic fingertip sensitivity development

A Modified Analytical Model to Study the Sensing Performance of a Flexible Capacitive Tactile Sensor Array

A rigid-flexible coupling pretravel error model for a touch-trigger probe in an on-machine inspection system

Analysis and design of spatial compliant mechanisms using a 3-D dynamic stiffness model

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

An Analytical Model for Studying the Structural Effects and Optimization of A Capacitive Tactile Sensor Array

Development of Elastic Diaphragm Structure for Ultra-low Stiffness Probe and Mechanical Properties Testing Method

Efficient Calibration of a Scanning Probe on CMM

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics

Investigation of Loading and Force Sensing Properties of a Probe-Type Microforce Sensor with Force-Distance Curves

Design and fabrication of a novel silicon probe for micromachined surface profilers

Fabrication and testing of a novel silicon probe for micromachined surface profilers.

An Optical Probe Stage and Its Applications in Mechanical Behavior Measurements of Micro-Objects and Thin Films

Design of Intellectualized 2-D Horizontal Probe

Probe Experimental Mechanics