Research on a two-dimension micromanipulator with no displacement and little concentrated stress parasite

Ji Huawei,Yang Shixi,Wu Zhaotong,Yan Gongbiao

DOI: https://doi.org/10.3321/j.issn:0254-3087.2006.11.027

2006-01-01

Abstract:Concentrated stress and parasite displacement are two key factors that influence the performance of micromanipulator based on flexure hinge and piezoelectric actuator. The merits and demerits of four-bar parallel micromanipulator and double four-bar parallel micromanipulator were analyzed. Taking their merits and eliminating their demerits, a compound four-bar parallel micromanipulator was proposed. Theoretical analysis and finite element simulation prove that the proposed micromanipulator features a little concentrated stress and no parasitic error. Based on above discussion three kinds of two-dimension micromanipulators were designed and manufactured, their performances were studied in experiments. Comparison experiment results show that the proposed compound four-bar two-dimension micromanipulator has the best performance.