Abstract:In the field of advanced manufacturing technology, there is a growing need for high-precision micro/nano positioners. The traditional single stage actuated positioners have encountered performance limitation in achieving longer travel range and higher precision. This motivates us to develop a novel dual stage piezoelectric-actuated micropositioner presented in this paper. The micropositioner incorporates displacement amplification mechanisms to overcome the limited range of piezoelectric actuators. Design considerations such as flexure characteristics and material selection are discussed, and structural analysis is performed using finite element analysis (FEA). For precise positioning, the dual stage control strategy is investigated and compared with the conventional proportional-integral-derivative (PID) single stage control method. In the proposed positioner, a combination of parallelogram and bridge mechanisms is utilized. The bridge mechanism works to amplify the piezoelectric actuator displacement output. The parallelogram mechanism, integrated within the system, helps mitigate resonance modes and contributes to the achievement of linearized motion. The characteristics of the micropositioner were evaluated using analytical modelling and FEA. Multiple analysis was used to optimise the positioner's design parameters. Furthermore, experimental studies were carried out to validate the characteristics of the micropositioner performance in terms of achievable output travel range and sustained positioning accuracy.

What problem does this paper attempt to address?

The purpose of this paper is to design and control a flexible two-stage piezoelectric micro-positioner to overcome the limitations of traditional single-stage drivers in achieving long travel and high precision. The paper mentions that although piezoelectric ceramics have advantages such as fast response and high precision, their displacement output is limited. Therefore, the researchers have adopted a novel two-stage piezoelectric driving micro-positioner combining parallelogram and bridge mechanisms to expand the range of displacement through amplification. They conducted structural analysis of the design, including flexible features and material selection, and used finite element analysis (FEA) to study precise control strategies, comparing them with traditional PID single-stage control methods. The paper also discusses different types of displacement amplification mechanisms, such as lever, bridge, and Scott-Russell mechanisms, and their respective advantages and disadvantages. The proposed design utilizes the bridge mechanism to amplify the displacement output of the piezoelectric actuator, while the parallelogram mechanism helps counteract resonance modes and achieve linear motion. The design of the positioner was further optimized through theoretical modeling, FEA analysis, and parameter optimization. In addition, experimental verification was conducted to evaluate the performance of the micro-positioner in terms of output travel and sustained positioning accuracy. The main objective of the research is to design a compact, high-precision, and large-displacement range two-stage micro-positioner, and develop the corresponding control strategy. Through experiments, the superiority of the proposed micro-positioner in terms of displacement amplification and accuracy over the designs in existing literature has been demonstrated.

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