Abstract:This paper presents the design, analysis, and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage driven by piezoelectric stack actuators. The stage is designed with two kinematic chains. In each kinematic chain, the end-effector of the stage is connected to the base by two symmetrically distributed flexure modules, respectively. Each flexure module comprises a fixed-fixed beam and a parallelogram flexure serving as two orthogonal prismatic joints. With the purpose to achieve high resonance frequencies of the stage, a novel center-thickened beam which has large stiffness is proposed to act as the fixed-fixed beam. The center-thickened beam also contributes to reducing cross-coupling and restricting parasitic motion. To decouple the motion in two axes totally, a symmetric configuration is adopted for the parallelogram flexures. Based on the analytical models established in static and dynamic analysis, the dimensions of the stage are optimized in order to maximize the first resonance frequency. Then finite element analysis is utilized to validate the design and a prototype of the stage is fabricated for performance tests. According to the results of static and dynamic tests, the resonance frequencies of the developed stage are over 13.6 kHz and the workspace is 11.2 μm × 11.6 μm with the cross-coupling between two axes less than 0.52%. It is clearly demonstrated that the developed stage has high resonance frequencies, a relatively large travel range, and nearly decoupled performance between two axes. For high-speed tracking performance tests, an inversion-based feedforward controller is implemented for the stage to compensate for the positioning errors caused by mechanical vibration. The experimental results show that good tracking performance at high speed is achieved, which validates the effectiveness of the developed stage.

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

A piezodriven three dimensional micropositioning stage for nano-manufacturing

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Design and Analysis of a New Flexure-Based XY Stage

Design, Analysis and Testing of a Novel Decoupled 2-DOF Flexure-Based Micropositioning Stage

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification.

A Novel Hybrid Actuation Mechanism Based XY Nanopositioning Stage with Totally Decoupled Kinematics

Design and Analysis of a New Flexure-Based XY Micropositioning Stage with Decoupled Motion Characteristic

Design and Analysis of a 2-D Piezoelectric Platform Based on Three-Stage Amplification and L-Shaped Guiding

X-Y Micropositioning Piezostage Design with Large Workspace Density

Design Of A Single-Plane Two-Dimensional Micropositioning Stage Based On The Oval Amplification Mechanism

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

Development of a Flexure-Based XY Positioning Stage for Micro/nano Manipulation

Design and Analysis of a XY Micro-Motion Stage Based on S Type Flexible Mechanism

Design, Analysis and Testing of A Parallel-Kinematic High-Bandwidth Xy Nanopositioning Stage

Design and analysis of a 2-degree-of-freedom flexure-based micro-motion stage

Design And Analysis Of A Novel Xy Micro-Positioning Stage Used Corrugated Flexure Beams

A Flexure-Based Kinematically Decoupled Micropositioning Stage with a Centimeter Range Dedicated to Micro/Nano Manufacturing

Design, modeling, and analysis of a new XYθ piezoelectric microstage featuring high amplification ratios and multiple actuation modes

A Decoupled Flexure-Based Rotary Micropositioning Stage with Compact Size

Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage