Design Of A Piezoelectric Exciter Actuator For Micro-Displacement Control - Theory And Experiment

H.S. Tzou

DOI: https://doi.org/10.1016/0141-6359(91)90501-9

1991-01-01

Abstract:High-precision and high-speed machine operation is very much in demand in modern manufacturing industry. However, mechanical vibrations introduced by various sources can easily disrupt this operation. Thus, vibration isolation and control have become very important in high-precision machine operation. This paper presents an active micro-position control technique using a piezoelectric actuator. A general theory for a piezoelectric actuator subjected to mechanical excitations and feedback voltages is developed. Piezoelectric excitation induced by the converse piezoelectric effect via direct voltage injection is first studied. Then, this electromechanical phenomenon is applied to an active micro-position control by injecting a processed feedback voltage at variable feedback gains into the piezoelectric actuator counteracting the external excitation. The effectiveness of the piezoelectric micro-position attenuation is evaluated analytically and experimentally. The theoretical solutions are compared favourably with the laboratory experimental data.