Piezoelectric Micro Driving Mechanism Design and Experiment

WANG Xiao-feng,FENG Zhi-jing
DOI: https://doi.org/10.3969/j.issn.1002-2333.2007.03.010
2007-01-01
Abstract:Nowadays, MEMS, precision machining develops impressively and swiftly and needs high resolution micro-driving system. Micro-driving technology has a bright future. And piezoelectric micro driving is acknowledged as good approach for its advantage like compact structure, high resolution, high frequency response, without noises etc. Thus, a piezoelectric micro driving mechanism with nano-scale resolution was framed and then introduced in this article. A symmetrical flexible hinge was utilized to guide the movement. Micro-displacement performance experiments were carried out in a superior clean laboratory. Experimental data shows that the mechanism has a resolution of 4nm and a response of 10ms. It could be utilized in many fields that require nano-scale actuators. And key factors to high resolution of piezoelectric micro driving were presented on the base of experiments.
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