A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

LIU Chao,ZHANG Hai-jun,ZHANG Dong-xian
DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.06.007
2005-01-01
Abstract:A new inertial micro-actuator based on piezo element directly driven by electronic circuits is developed.This article introduces the principle and setup of the actuator in detail.Some experiments are carried out to measure the micro displacement and dynamic property of the actuator.The experiments show that the actuator is capable of generating a smooth movement under the voltages of 20V~350V and 20Hz~125Hz.The average step ranges from 60nm~1502nm,and the maximum speed reaches to 120μm/s with infinite moving range.The application of the micro-actuator in scanning tunneling microscope for tip approaching is also discussed.
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