Abstract:This paper reports a new stick-slip piezoelectric linear actuator with large load density, compact size, and high resolution. It is devised using a dual-arch bridge-type driving mechanism (DBDM) and an integrated elliptical preload mechanism(IEPM). The DBDM can generate a coupling motion on the driving point, which provides clamping and releasing actions during stick-slip motion. Also, the DBDM can magnify the clamping force with large amplification ratios, thus improving driving force and load-carrying capacity. The IEPM uses compact flexure hinges to adjust preload force, reducing structural dimension. Then, theoretical analysis and simulations are conducted, and a prototype is fabricated. A modified driving voltage with smooth turning points is designed to improve motion properties further. Experiments show that load density is 0.037 g/mm $^{\mathbf{3}}$ under the driving voltage of 100 V. The actuator has an overall size of 33.6 mm $\times$ 20 mm $\times$ 8 mm and a displacement resolution of 22 nm. Note to Practitioners —Most research on linear actuators focused on motion displacement improvement, and more research needs to be done on improving load-carrying capacity. Therefore, this paper designs a force amplification linear actuator with a compact structure using the DBDM. In the experimental stage, the sudden change of the driving signal affects the output performance, and a modified sawtooth voltage is used to improve the output speed and load-carrying capacity. The experimental results show that under the modified sawtooth wave voltage, the maximum speed of the slider is 1.4 mm/s, and the speed is increased by 17% compared with the traditional wave. When a 200 g load is applied to the slider, the linear actuator operates at a stable speed of 1.2 $\mu $ m/s, 33% faster than conventional sawtooth waves. As a result, the designed actuator has superior performance at higher loads.

A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

A 2-Dof Piezoelectric Inchworm Actuator for Precise Positioning

Inchworm-like in-pipe micro-robot actuated by piezoelectric slotted cymbal

A Single-Clamp Inchworm Actuator with Two Piezoelectric Stacks

Development and test of a high speed pusher-type inchworm piezoelectric actuator with asymmetric driving and clamping configuration

Design and experimental evaluation of an inchworm motor driven by bender-type piezoelectric actuators

Linear Inchworm Mechanism Based on Giant Magnetostrictive and Piezoelectric Materials

Design and Control of a Piezoelectric Ceramic-actuated and Flexure Hinge-based Micromanipulator

An Inchworm Type Piezoelectric Actuator Working in Resonant State

Design and Development of a Piezoelectric Linear Actuator for Smart Structures

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Design and experimental evaluation of a compact inchworm piezoelectric actuator with bridge-type displacement amplification mechanism

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

A Gravity-Assisted Piezoelectric Inertial Actuator for Bidirectional Smooth Drives by Single Excitation Source

A piezoelectric inertial actuator operating with elliptical drive and stick-slip drive modes

A New Stick-Slip Piezoelectric Actuator Using Dual-Arch Bridge-Type Compliant Mechanisms

Design, analysis and experimental performance of a stepping type piezoelectric linear actuator based on compliant foot driving

A Linear Piezoelectric Inchworm Motor Using Ultrasonic Clamping Vibrator

A Novel Four legged linear piezoelectric inchworm motor with high thrust force

A Linear Piezoelectric Actuator Based on Working Principle of Three-Petal Mouth of a Rabbit