Linear Inchworm Mechanism Based on Giant Magnetostrictive and Piezoelectric Materials

LI Cuihong,YE Zishen,MENG Yonggang,TIAN Yu,WEN Shizhu
DOI: https://doi.org/10.3321/j.issn:1000-0054.2005.08.013
2005-01-01
Abstract:A linear inchworm mechanism was developed with a magnetostrictive actuator and two piezoelectric translators fixed in a specially designed flexible frame to provide both long travel range and high positioning precision. The mechanism movement is controlled by a closed-loop feed back algorithm using a high precision length gauge as the transducer. Test results indicate that the mechanism reliably moves forward and backward with a positioning accuracy of up to 15 nm.
What problem does this paper attempt to address?