A Linear Piezoelectric Inchworm Motor Using Ultrasonic Clamping Vibrator

Longtu Li
1993-01-01
Abstract:This paper reports a kind of linear piezoelectric inchworm motor using ultrasonic clamping vibrator with ring-shaped three-pile piece construction. The clamping vibrator and guide shaft of the motor constitute the friction pair. The ratio of moving friction coefficient to static one is about 1:10, when the clamping vibrator is in resonance. The driving peak voltage of the clamping vibrator is only 120V (Vp-p). The velocities of the motor are 0-2 mm / min, the driving force is about 0.2 kgf, and the mechanic resolving power is less than 50nm. The motor's technique is simple.
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