Research on novel inertial linear ultrasonic piezoelectric motor

Jia-mei JIN,Yun-lai SHI,Yu-bao LI,Chun-sheng ZHAO
DOI: https://doi.org/10.3321/j.issn:1004-924X.2008.12.010
2008-01-01
Optics and Precision Engineering
Abstract:A novel inertial linear ultrasonic piezoelectric motor is developed,which can transfer motion through friction in the form of inertial displacement by combining the converse piezoelectric effect and the principle of inertial displacement of piezoelectrical crystal.This motor is composed of a stator and a mobile element.The stator contains a displacement enlargement element,a multilayer piezoelectric actuator and a shaft and the mobile element is a ring with a gap and an annular flute.In this paper,the running principle of the motor is investigated in detail and the effects of two exciting modes on the performance of the motor is analyzed by the simulation and the experiment synchronously.ExPeri-mental results show that the excited effect of square wave signal on this motor is better than that of saw-tooth wave signal.The no-load speed of a prototype achieves 11 mm/s and the largest thrust achieves 0.5 N in operation voltage of 50 V and driving frequency of 80 kHz.
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