Standing Wave-Type Bi-Directional Linear Moving Ultrasonic Motor Using Plates and Weak Links

Bo Wang,J. Y. Dai,Jifeng Guo
DOI: https://doi.org/10.1117/12.779873
2007-01-01
Abstract:A new trial of standing wave type bi-directional moving linear ultrasonic motor has been studied in this paper. Finite element modeling analysis revealed that by connecting three rectangular metal plates in different lengths together by two weak links, two bending vibration mode standing waves, i.e., one in sine wave and the other one in cosine wave, with nearly the same wavelength can be formed in the middle plate. With four pieces of PZT-4 piezoceramics mounted to the middle plates as driving elements, a new type of bi-directional linear moving ultrasonic motor of 60mm in length and 10mm in width has been designed, fabricated and characterized. The following performances have been achieved: maximum velocity 220nim/s, maximum output force 180gf, and resolution better than 0.2 mu m.
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