Abstract:The spectral characteristic of materials is the key factor of the photothermal microactuator's performance. The present article introduces the operating principle, and analyzes the relationship between the material spectral characteristic and its expansion. As the photothermal microactuator is an innovative microactuator based on photothermal expansion that absorbs the laser energy and converts it into internal energy to realize the microdrive, the optimal photothermal expansion material with proper absorption spectrum characteristic matching the spectrum of light driving source needs to be found. The reflection and absorption spectra of four types of polymeric material, including PVC, HDPE, LDPE and PET, were obtained by using the single integrating sphere method. The results indicate that the reflection spectrum of the dyed high-density polyethylene (HDPE) is of double-peak structure in visible band, and there is strong absorption within the range of 600-690 nm, which means it would match the light driving source quite well in the broad spectral range. Therefore, HDPE was chosen as the photothermal expansion material. In order to check out the feasibility and performance of the photothermal microactuactor based on HDPE, a prototyping microactuator 1 500 mm in length and 30 mm in thickness was manufactured by using an excimer laser micromachining system. With a laser diode (10 mW/650 nm) as the external power source to activate the microactuator, performance measurement experiments were carried out by using a self-produced video movement measurement system with a CCD-coupled microscope. The experiment results demonstrate that the deflection of the microactuator reaches 18.7 mm at 10 mW of laser power, showing that the characteristics of spectral absorption and light-heat transition are quite well at 650 nm. This novel photothermal microactuator has simple structure, adjustable displacement output, and more mobility, and can be controlled remotely, so it will be quite useful for applications in the fields of micro-optical-electro-mechanical systems (MOEMS).

The Effect of Infrared Laser-Induced Micro/Nano Photothermal Expansion and the Novel Method of Photothermal Actuation

Analysis and experimentation of novel asymmetric photo-thermal micro-actuator

Study of New Photothermal Microactuator Based on Micro/nano Scale Photothermal Expansion

Theoretical Modeling of Microscopic Photothermal Expansion and Experimental Study of Photothermal Microactuators

Analysis and Experimentation of Novel Bi-Directional Photo-Thermal Micro-Actuators

Photothermal Microactuator Manufactured by Excimer Laser

Theory and experiment study of micro/nano photothermal expansion

Development of Photothermal Microactuator Based on Spectral Analysis of Photothermal Expansion Material

Photothermal Microactuators Fabricated by LIGA Technology

Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

Dynamic characteristics of micro-optothermal expansion and optothermal microactuators

Experimental Research of a Novel Contact-Switch Microactuator Controlled by Laser-Induced Photothermal Expansion

Novel Photothermal Microactuator and Its Microscopic Motion Measurement

Theoretical and Experimental Study of Photo-Thermal Expansion Using an Atomic Force Microscope

Theoretical and experimental study of optothermal expansion and optothermal microactuator.

Dynamic Properties of a Metal Photo-Thermal Micro-Actuator

Atomic Force Microscope Study Of Mechanism Of Micro Photo-Thermal Expansion

Microscopic Observation and Laser‐controlled Microoptothermal Drive Mechanism

Microcantilever Actuation by Laser Induced Photoacoustic Waves

A Novel Inertial Micro-Actuator and Its Application in Positioning Mechanism

Rapidly responsive liquid metal/polyimide photothermal actuators designed based on the bilayer structure difference in coefficient of thermal expansion