Abstract:Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. The structure and working principle of the proposed actuator are illustrated and its kinematic characteristic is analyzed. The stiffness of the spatial compliant mechanisms is modeled, and the dynamic characteristics are analyzed, Finite Element method is utilized to validate the correctness of the stiffness modeling and the free vibration analysis of the proposed actuator. A prototype actuator is fabricated and its output performances have been tested. Working space of X ranging from -7.1 to 5.6 μm, Y ranging from -6.2 to 8.2 μm and Z ranging from -2.3 to 2.1 μm, displacement resolutions of 15/16/21 nm along X-/Y-/Z-axis and average velocities of 52.3, 82.8 and 29.5 µm/s along X-axis, Y-axis, and Z-axis with carrying load up to 2 kg and driving frequency of 500 Hz have been achieved by the prototype actuator. The method of waveform generating for the proposed actuator has been developed with the inverse hysteresis compensation, and test results indicate that the positioning accuracy of the prototype actuator in the open loop has been improved from 0.94 to 0.23 μm for a circular trajectory tracking, from 0.48 to 0.29 μmm for an elliptical trajectory tracking, and from 0.61 to 0.32 μm for a rectangular trajectory tracking with the compensated waveform of driving voltage.

Design and Analysis of a Precision Multi-DOF Placement Device

Precision Placement Analysis of a New Multi-DOF Piezoelectric End-Effector via Finite Elements

Design and Control of a Piezoelectric Ceramic-actuated and Flexure Hinge-based Micromanipulator

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

A piezodriven three dimensional micropositioning stage for nano-manufacturing

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Development of a light-weight robot end-effector using polymeric piezoelectric bimorph

Design and Control of a Flexure-Based Dual Stage Piezoelectric Micropositioner

Redundantly Piezo-Actuated XYθ Z Compliant Mechanism for Nano-Positioning Featuring Simple Kinematics, Bi-Directional Motion and Enlarged Workspace

Distributed piezoelectric sensor/actuator design for dynamic measurement/control of distributed parameter systems: A piezoelectric finite element approach

A 3-DOF sandwich piezoelectric manipulator with low hysteresis effect: Design, modeling and experimental evaluation

Design Of A Piezoelectric Exciter Actuator For Micro-Displacement Control - Theory And Experiment

A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment

Design and Analysis of a Two-Degrees-of-freedom Monolithic Compliant Piezoelectric Microgripper

Development of a three-degree-of-freedom piezoelectric actuator

Design and Test of a 2-DOF Compliant Positioning Stage with Antagonistic Piezoelectric Actuation

Dynamics and Distributed Vibration Controls of Flexible Manipulators; Integrated Distributed Sensing and Active Piezoelectric Actuator

A Novel Flexure-Based 3-DOF Micro-Parallel Manipulator with a Gripper for Micro/nano Manipulation

Piezothermoelasticity and Precision Control of Piezoelectric Systems: Theory and Finite Element Analysis

Review on Multi-Degree-of-Freedom Piezoelectric Motion Stage