Abstract:This paper designs a two-degrees-of-freedom (DOF) compliant positioning stage with antagonistic piezoelectric actuation. Two pairs of PEAs are arranged in an antagonistic configuration to generate reciprocating motions. Flexure mechanisms are intentionally adopted to construct the fixtures for PEAs, whose elastic deformations can help to reduce the stress concentration on the PEA caused by the extension of the PEA in the other direction. Subsequently, the parameter and performance of the 2-DOF compliant positioning stage is optimized and verified by finite element analysis. Finally, a prototype is fabricated and tested. The experimental results show that the developed positioning stage achieves a working stroke of 28.27 μm × 27.62 μm. Motion resolutions of both axes are 8 nm and natural frequencies in the working directions are up to 2018 Hz, which is promising for high-precision positioning control.
What problem does this paper attempt to address?
The problem this paper attempts to address is:
In fields such as micro-nano fabrication, biological manipulation, and optical posture adjustment, the demand for high-precision driving technology is increasing. These fields require driving methods with characteristics such as large travel range, high resolution, and multiple degrees of freedom (DOF). However, traditional single driving methods find it difficult to simultaneously meet the requirements of large travel range and high-precision positioning. Therefore, combining coarse motion (to achieve large travel range) and fine motion (to achieve high resolution) methods has become a solution.
Specifically, this paper designs a two-degree-of-freedom (2-DOF) flexible positioning platform using antagonistic piezoelectric actuators (PEA). This design aims to address the following issues:
1. **Bidirectional Drive**: Traditional single piezoelectric actuators can only achieve unidirectional drive and require a bias voltage to achieve bidirectional drive, which can lead to prolonged energization of the actuator, potentially causing overheating and reduced lifespan. The antagonistic configuration can achieve bidirectional drive without initializing to half of the maximum control voltage, thereby reducing the energization time of each piezoelectric actuator.
2. **Stress Concentration**: In traditional fixed-end designs, each piezoelectric actuator needs to withstand preload force and driving force in the opposite direction, which can easily lead to irreversible damage and reduced lifespan. By introducing a flexible mechanism to connect the piezoelectric actuators, stress concentration can be effectively released, protecting the piezoelectric actuators.
3. **High-Precision Positioning**: By optimizing design parameters and performance verification, the positioning platform ensures high motion resolution and natural frequency, making it suitable for high-precision positioning control.
In summary, this paper aims to design a two-degree-of-freedom flexible positioning platform capable of achieving high-precision bidirectional drive, low stress accumulation, and short energization time to meet the high demands of micro-nano fabrication and precision control fields.