TrappedCharge Distribution During Thep/ecycling Ofsonosmemory

Huiqing Pang,Liyang Pan
2006-01-01
Abstract:Twophases during thePIEcycling of0.18um SONOSareobserved using a combined Charge Pumping methodtoextract thetrapped charge distribution: holes accumulation attheinitial term, andelectrons accumulation after long termcycling. Better endurance characteristic is obtained through optimization toPIEcondition andprocess technology. Vd=7.6V 9 ~~~~~~~~~Vd =3.V trapped charges makes2-bit application possible andcan v=ssv 8 - reduce charge loss caused bydefects effectively, italso brings > 5 4 d 5 about problems tothereliability characteristics including the endurance andretention characteristics, whichisgreatly hindering thedevelopment ofSONOS-type memory. Dueto 4 4
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