Charge Pumping Measurement for Determing Band-to-Band-Tunneling Induced Interface Damage During Erasing Operation of FLASH

Yu SU,Jun ZHU,Yu-chuan CHEN,Li-yang PAN,Zhi-hong LIU
DOI: https://doi.org/10.3969/j.issn.1674-4926.2001.01.013
2001-01-01
Abstract:A charge pumping method is proposed for the measurement of hole-induced interface states and trapped charges due to band-to-band-tunneling the effects during the erasing operation of FLASH.These charges affect the long reliability of ICs.The spatial distribution of surface states and trapped charges are directly determined by the variation of the charge-pumping current before and after applying stress.Theoretical and experimental bases are provided for the cell design of FLASH and the improvement in reliability.
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