A new technique for probing the energy distribution of positive charges in gate dielectric

z ji,s w m hatta,j f zhang,weijuan zhang,james niblock,p bachmayr,lee k stauffer,k w j wright,stuwart e greer
DOI: https://doi.org/10.1109/ICMTS.2014.6841470
2014-01-01
Abstract:To simulate the impact of stress-induced positive charges in gate dielectric on devices and circuits, it is essential to know their energy distribution both within and beyond substrate band-gap. A new technique is proposed for measuring this distribution and successfully implemented on industrial parameter analyzer. We demonstrate its generic applicability to both SiON and high-k/SiON stacks and its capability in evaluating different materials and processes. This makes it a useful tool in a typical test laboratory for material and process optimization.
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