Thermally Oxidized Formation Of New Ge Dots Over As-Grown Ge Dots In The Si Capping Layer
TianXiao Nie,Jinhui Lin,Zhigang Chen,YuanMin Shao,Yueqin Wu,Xinju Yang,Yongliang Fan,Zuimin Jiang,Jin Zou
DOI: https://doi.org/10.1063/1.3665398
IF: 2.877
2011-01-01
Journal of Applied Physics
Abstract:A Si-capped Ge quantum dot sample was self-assembly grown via Stranski-Krastanov mode in a molecular beam epitaxy system with the Si capping layer deposited at 300 degrees C. After annealing the sample in an oxygen atmosphere at 1000 degrees C, a structure, namely two layers of quantum dots, was formed with the newly formed Ge-rich quantum dots embedded in the oxidized matrix with the position accurately located upon the as-grown quantum dots. It has been found that the formation of such nanostructures strongly depends upon the growth temperature and oxygen atmosphere. A growth mechanism was proposed to explain the formation of the nanostructure based on the Ge diffusion from the as-grown quantum dots, Ge segregation from the growing oxide, and subsequent migration/agglomeration. (C) 2011 American Institute of Physics. [doi:10.1063/1.3665398]