Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

Vertical Self-Alignment of Quantum Dots in Superlattice

Self-assembly of quantum dots: effect of neighbor islands on the wetting in coherent Stranski-Krastanov growth

Finite Element Analysis on Stress Distribution in Buried Quantum Dots

Tuning Quantum Dot States with Optical Fields

Size and Geometry Dependence of Surface Strain fields in Systems of Buried Quantum Dots

Some thermodynamic aspects of self-assembly of arrays of quantum dots

Critical Thickness of Self-Assembled Ge Quantum Dot Superlattices

Spontaneous Formation of Vertically Anticorrelated Epitaxial Islands on Ultrathin Substrates

Structural Characteristics of Self-Assembled-Ge/Si Quantum Dot Superlattices

Dependence of surface strain on island geometry in embedded quantum-dot systems

The elastic relaxation energy and equilibrium aspect ratio of self-organized pyramidal quantum dot

Spontaneous Localization in InAs/GaAs Self-Assembled Quantum-Dot Molecules

Probing the Spatial Variation of the Inter-Valley Tunnel Coupling in a Silicon Triple Quantum Dot

Feasibility study for thermal-field directed self-assembly of heteroepitaxial quantum dots

Self-aligned photonic defect microcavities with site-controlled quantum dots

Vertical Coupling of Quantum Islands in the CdSe/ZnSe Submonolayer Superlattices

Strain-Mediated Patterning of Surface Nanostructure by the Subsurface Island Array

1.3-Mu M Inas/Gaas Quantum Dots Grown On Si Substrates

Strain-controlled correlation effects in self-assembled quantum dot stacks

Anomalous Quantum-Confined Stark Effects in StackedInAs/GaAsSelf-Assembled Quantum Dots

Influence of Capping Layer and Atomic Interdiffusion on the Strain Distribution in Single and Double Self-Assembled Inas/Gaas Quantum Dots