The Investigation Of Impurity Distributions Around An Oval Defect In Molecular-Beam Epitaxy Algaas/Gaas Single Quantum-Wells By Transmission Electron-Microscopy And Cathodoluminescence

J Wang,Jw Steeds,Cw Tu
1989-01-01
Abstract:TEM and TEM-CL have been used to study the impurity distributions along lateral and growth directions around a particular type of oval defect in MBE AlGaAs/GaAs SQWs sample with four single wells of different well width. Some twins, dislocations and stacking faults were observed around the core of the oval defect, which was found to consist of misoriented crystal. The results of TEM-CL experiments show that the impurities are trapped mainly in the first grown well. The impurities sitting near the middle of the well are concentrated in a region very near the core of the defect, while those sitting at the interfaces are more widely dispersed around the defect.
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