Fabrication of GMR Linear Sensor Based on Spin Valve

LI Wei,LIU Hua-rui,LIU Peng,REN Tian-ling,LIU Li-tian
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.199
2006-01-01
Abstract:Using annealing technology GMR linear sensor based on spin valve is fabricated. The coercivity of GMR sensor is less than 0.01Oe, the sensor is good linearity. The wide of serpentine sensing resistor affect the capability of GMR sensor. With the wide of serpentine sensing resistor reducing, the linear range of GMR sensor is increase and the sensitivity of GMR sensor is reducing, the results of experiment and theory simulation are consistent.
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