Investigation of Magnetic Field Sensor Base on GMR Nano-Thin-Film

Liu Huarui,Ouyan Keqing,Ren Tianling,Qu Bingjun,Li Wei,Liu Litian
DOI: https://doi.org/10.3321/j.issn:1004-132X.2005.z1.042
2005-01-01
Abstract:Magnetic field sensors using GMR thin films are fabricated utilizing process including high vacuum magneto sputtering, iron beam etching, photolithography, Al sputtering, lift off etc. The MR ratio and coercivity of the GMR film after annealing are 7.91% and 0.05/4π × 103A/m(0.05Oe), respectively. The linear range of the magnetic field sensors using this GMR film is from-15/sπ × 103- 15/4π × 103A/m, and the linearity of this sensor is 0.9993. This magnetic field sensor with high linearity plays an important role in the auto industry and auto control system.
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