Study on Micro Fluxgate Magnetic Sensor

Y. Jianzhong,W. Yiming,You Zheng,Liu Gang,Li Bin,Zhang Gao-fei
2005-01-01
Abstract:Based on MEMS technology, a novel type of micro fluxgate magnetic sensor (MFGM), which exploits magnetic fluxgate principle, has been designed. It has symmetrical geometry, and is flexible for electrical connection, easy to form as a two-axis or a one-axes vector sensor. MFGM is easily assembled into a 3-axis subminiature magnetometer and can be applied to measure vector of the weak geomagnetic field. The microfabrication process has been developed. The UV lithography technology in combination with thick negative and positive photoresists is exploited in the microfabrication. The original samples have been produced with the dimension of 1 cm ×1 cm ×100 um . MFGM can be widely applied in the conventional and potential fields, for examples, scientific research, automation, process control of industry, mineral prospecting, medical appliance, especially in micro-satellite (including nano-satellite and pico-satellite) missions. It is a important part of Attitude Determination and Control System (ADCS) subsystem of MEMSSat-1 pico-satellite (researched by Tsinghua Univ.), used to obtain information about the attitude of the satellite individually or in combination with other parts such as Micro Inertial Measurement Unit (MIMU).
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