Presbyesophagus: A reappraisal

K. DeVault

DOI: https://doi.org/10.1007/S11894-002-0062-7

2002-06-01

Current Gastroenterology Reports

Abstract:

What problem does this paper attempt to address?

Three-Axis Vector Magnetometer with a Three-Dimensional Flux Concentrator

Shih-Jui Chen,Der-Tai Hong,Ping-Hsun Hsieh,Tse-Kang Wang

DOI: https://doi.org/10.3390/s24051659

IF: 3.9

2024-03-05

Sensors

Abstract:This research proposes a magnetic field sensor with spatial orientation ability. Through the assistance of a magnetic flux concentrator, out-of-plane magnetic flux can be concentrated and guided into the planar magnetic cores of a fluxgate sensor. A printed circuit board is used to construct the basic planar structure, on which the proposed three-dimensional magnetic flux concentrator and magnetic cores are assembled. This reduces the alignment error of the coils and improves the reliability of the sensor. Three-axis sensing is achieved by using the second harmonic signals from selected sensing coil pairs. The magnetometer exhibits a linear range to 130 μT. At an excitation frequency of 50 kHz, the measured sensitivities are 257.1, 468.8, and 258.8 V/T for the X-, Y-, and Z-axis sensing modes, respectively. This sensor utilizes only one sensing mechanism for the vector field, making it suitable for IoT applications, especially for assessing mechanical posture or position.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Coil misalignment analysis under different radius of coil and wire for Wireless Power Transfer System

K. N. Mude,M. T. Outeiro

DOI: https://doi.org/10.1109/IECON.2017.8216921

2017-10-01

Abstract:Coil system is considered one of the most important subsystems in a Wireless Power Transfer System (WPTS). The maximum efficiency for which a WPTS is designed, only occurs when the coils are perfectly alligned otherwise degradation takes place. At the design level the radius of the coils and wire has impact on the efficiency of the wireless transmission and is the case of consideration of this paper. The paper carries out a thorough evaluation of the magnetic parameters such as; i) self-inductance, ii) mutual inductance and iii) coupling coefficient versus misalignment conditions for different values of coil and wire radius. The analysis is validated by simulations through Comsol Multiphysics, by Finite Element Method (FEM) based.
Three Dimensional Compensation Spherical Coils for Compact Atomic Magnetometers

C. Zhuo,H. Dong,L. Xuan

DOI: https://doi.org/10.1109/nems.2013.6559815

2014-01-01

Abstract:To avoid the broadening of Zeeman resonances of the vector atomic magnetometer working in an unshielded environment, the rapid and accurate magnetic compensation is necessary. A three dimensional mini spherical compensating system is presented, which can be used together with a chip-scale atomic magnetometer to realize an ultra-high precision field measurement. Based on the field gradient method, parameters are optimized to obtain a uniformity of 10-3 over the region of one half radius with a good tolerance on dimensional variations. A prototype applied in the single laser beam scheme has been built and the experimental results demonstrate the validity of the design.
Design of CMOS magnetic sensor integrated circuit

Qing Guo,DaZhong Zhu,Yunruo Yao

DOI: https://doi.org/10.1109/icsict.2004.1435165

2004-01-01

Abstract:A new CMOS magnetic sensor integrated circuit has been developed in a 0.6μm CMOS technology. The single chip integration of the split-drain magnetic field-effect transistor (MAGFET) and the subsequent signal processing circuits is realized. With the pre-processing circuit and correlated double sampling (CDS) circuits, the fixed pattern noise (FPN) is greatly reduced. The MAGFET is sectorial with the radius of 48μm and the angle of 90 degree. The relative sensitivity of the magnetic sensor can be 87.3mV/(T·μs). © 2004 IEEE.
Cmos Magnetic Sensor Integrated Circuit with Sectorial Magfet

Q Guo,DZ Zhu,YR Yao

DOI: https://doi.org/10.1016/j.sna.2005.10.004

2006-01-01

Abstract:In this paper, a CMOS magnetic sensor integrated circuit (IC) for a perpendicular magnetic field is introduced. The sensor integrated circuit is designed and fabricated in a 0.6 mu m digital CMOS process. It consists of a pair of common-source split-drain magnetic field-effect transistor (MAGFET), a pre-processing circuit with a switches array, a correlated double sampling (CDS) circuit and a digital controlling part. The measurements of perpendicular magnetic field as well as the noise shaping are realized on-chip by the two functioning modes of the sensor integrated circuit.The MAGFET is sectorial with a radius of 48 mu m and an angle of 90 degrees, and the measured sensitivity SA (current-related sensitivity) is 3.61%/T. At the working frequency of 10 kHz, the sensitivity of the magnetic sensor is 2.62 V/T. (C) 2005 Elsevier B.V. All rights reserved.
Development of CMOS-MEMS in-plane magnetic coils for application as a three-axis resonant magnetic sensor

chuni chang,minghan tsai,chihming sun,weileun fang

DOI: https://doi.org/10.1088/0960-1317/24/3/035016

2014-01-01

Journal of Micromechanics and Microengineering

Abstract:This study designs and implements a single unit three-axis magnetic sensor using the standard TSMC 0.35 mu m 2P4M CMOS process. The magnetic sensor consists of springs, a proof-mass with embedded magnetic coils, and sensing electrodes. Two sets of in-plane magnetic coils respectively arranged in two orthogonal axes are realized using the stacking of metal and tungsten layers in the CMOS process. The number of turns for the proposed in-plane magnetic-coil is not restricted by the space and thin film layers of the CMOS process. The magnetic coils could respectively generate Lorentz and electromagnetic forces by out-of-plane and in-plane magnetic fields to excite the spring-mass structure. Capacitance sensing electrodes could detect the dynamic response of the spring-mass structure to determine the magnetic fields. Measurements indicate the typical sensitivities of the sensor are 0.21 mu V mu T-1 (x-axis), 0.20 mu V mu T-1 (y-axis), and 0.90 mu V mu T-1 (z-axis) at 1 atm. Moreover, the resolutions of the sensor are respectively 384 nT rtHz(-1) for the x-axis, 403 nT rtHz(-1) for the y-axis, and 62 nT rtHz(-1) for the z-axis at 1 atm. The presented magnetic sensor could monolithically integrate with other CMOS-MEMS devices for various applications.
Inverted Pyramid 3-axis Silicon Hall Effect Magnetic Sensor With Offset Cancellation

Jacopo Ruggeri,Udo Ausserlechner,Helmut Köck,Karen M. Dowling

2024-09-06

Abstract:Microelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their reliability, low cost and CMOS compatibility. This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure, realized by leveraging MEMS micromachining and CMOS processing. The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area. Through the use of various bias-sense detection modes, the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure. In addition, the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method. The device presented in this work demonstrated high in-plane and out-of-plane current- and voltage-related sensitivities ranging between 64.1 to 198 V A$^{-1}$ T$^{-1}$ and 14.8 to 21.4 mV V$^{-1}$ T$^{-1}$, with crosstalk below 3.7 %. The sensor exhibits a thermal noise floor which corresponds to approximately 0.5 $\mu$T/$\sqrt{Hz}$ at 1.31 V supply. This novel Hall-effect sensor represents a promising and simpler alternative to existing state-of-the-art 3-axis magnetic sensors, offering a viable solution for precise and reliable magnetic field sensing in various applications such as position feedback and power monitoring.

Instrumentation and Detectors
Development of Multi-Axes CMOS-MEMS Resonant Magnetic Sensor Using Lorentz and Electromagnetic Forces

C. -I. Chang,M. -H. Tsai,Y. -C. Liu,C. -M. Sun,W. Fang

DOI: https://doi.org/10.1109/memsys.2013.6474210

2013-01-01

Abstract:The stacking of metal/tungsten layers as the in-plane magnetic-coil for CMOS-MEMS magnetic sensor has been proposed and demonstrated for the first time. Magnetic fields introduce forces through in-plane coils to drive suspended spring-mass structure. Capacitance sensing electrodes could detect the dynamic response of spring-mass structure to determine magnetic fields. Such design has the following advantages: (1) Number of turns for proposed in-plane magnetic-coil is not restricted by the space and thin film layers, (2) in-plane magnetic-coil could respectively generate Lorentz and electromagnetic forces by out-of-plane and in-plane magnetic fields for multi-axes magnetic field detection, and (3) easy integration with CMOS-MEMS accelerometers and sensing circuits [1]. The design was implemented using the standard TSMC 2P4M CMOS process. A 400μm×300μm proof-mass with embedded in-plane magnetic-coil of 35-turns/5μm-wide is demonstrated. Measurement indicates the 3-axis magnetic fields were successfully detected using two monolithically integrated perpendicular sensing units. At 1atm, the sensor has the resolution of 319.9nT/rtHz (x-axis magnetic field), 296.5nT/rtHz (y-axis), and 121.6nT/rtHz (z-axis).
Out-of-Plane Cmos Compatible Magnetometers

M. El Ghorba,N. André,S. Sobieski,J. -P. Raskin,J.-P. Raskin

DOI: https://doi.org/10.48550/arXiv.0802.3077

2008-02-21

Other Computer Science

Abstract:Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-of-plane ferromagnetic nickel plate magnetometer is also presented.
Study on Micro Fluxgate Magnetic Sensor

Y. Jianzhong,W. Yiming,You Zheng,Liu Gang,Li Bin,Zhang Gao-fei

2005-01-01

Abstract:Based on MEMS technology, a novel type of micro fluxgate magnetic sensor (MFGM), which exploits magnetic fluxgate principle, has been designed. It has symmetrical geometry, and is flexible for electrical connection, easy to form as a two-axis or a one-axes vector sensor. MFGM is easily assembled into a 3-axis subminiature magnetometer and can be applied to measure vector of the weak geomagnetic field. The microfabrication process has been developed. The UV lithography technology in combination with thick negative and positive photoresists is exploited in the microfabrication. The original samples have been produced with the dimension of 1 cm ×1 cm ×100 um . MFGM can be widely applied in the conventional and potential fields, for examples, scientific research, automation, process control of industry, mineral prospecting, medical appliance, especially in micro-satellite (including nano-satellite and pico-satellite) missions. It is a important part of Attitude Determination and Control System (ADCS) subsystem of MEMSSat-1 pico-satellite (researched by Tsinghua Univ.), used to obtain information about the attitude of the satellite individually or in combination with other parts such as Micro Inertial Measurement Unit (MIMU).
An Integrated Single-Beam Three-Axis High-Sensitivity Magnetometer

Shengran Su,Zhenyuan Xu,Xiang He,Chanling Yin,Miao Kong,Xuyuan Zhang,Yi Ruan,Kan Li,Qiang Lin

DOI: https://doi.org/10.3390/s23063148

IF: 3.9

2023-03-15

Sensors

Abstract:Three-axis atomic magnetometers have great advantages for interpreting information conveyed by magnetic fields. Here, we demonstrate a compact construction of a three-axis vector atomic magnetometer. The magnetometer is operated with a single laser beam and with a specially designed triangular 87Rb vapor cell (side length is 5 mm). The ability of three-axis measurement is realized by reflecting the light beam in the cell chamber under high pressure, so that the atoms before and after reflection are polarized along two different directions. It achieves a sensitivity of 40 fT/Hz in x-axis, 20 fT/Hz in y-axis, and 30 fT/Hz in z-axis under spin-exchange relaxation-free regime. The crosstalk effect between different axes is proven to be little in this configuration. The sensor configuration here is expected to form further values, especially for vector biomagnetism measurement, clinical diagnosis, and field source reconstruction.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Chi-Han Wu,Cheng-Chih Hsu,Yao-Chuan Tsai,Chi-Yuan Lee,Ching-Liang Dai

DOI: https://doi.org/10.3390/mi14051038

2023-05-12

Abstract:The design, fabrication, and measurement of a microelectromechanical system (MEMS) three-axis magnetic field sensor (MFS) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The MFS is a magnetic transistor type. The performance of the MFS was analyzed employing the semiconductor simulation software, Sentaurus TCAD. In order to decrease the cross-sensitivity of the three-axis MFS, the structure of the MFS is planed to accommodate two independent sensing components, a z-MFS utilized to sense magnetic field (M-F) in the z-direction and a y/x-MFS composed of a y-MFS and a x-MFS to be utilized to sense M-F in the y- and x-directions. The z-MFS incorporates four additional collectors to increase its sensitivity. The commercial 1P6M 0.18 μm CMOS process of the Taiwan Semiconductor Manufacturing Company (TSMC) is utilized to manufacture the MFS. Experiments depict that the MFS has a low cross-sensitivity of less than 3%. The sensitivities of z-, y-, and x-MFS are 237 mV/T, 485 mV/T, and 484 mV/T, respectively.
Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology

Chi-Han Wu,Po-Jen Shih,Yao-Chuan Tsai,Ching-Liang Dai

DOI: https://doi.org/10.3390/s21216953

2021-10-20

Abstract:A three-axis micro magnetic sensor (MS) is developed based on the standard 180 nm complementary metal oxide semiconductor (CMOS) technology. The MS designs two magnetic sensing elements (MSEs), which consists of an x/y-MSE and an z-MSE, to reduce cross-sensitivity. The x/y-MSE is constructed by an x-MSE and an y-MSE that are respectively employed to detect in the x- and y-direction magnetic field (MF). The z-MSE is used to sense in the z-direction MF. The x/y-MSE, which is constructed by two magnetotransistors, designs four additional collectors that are employed to increase the sensing current and to enhance the sensitivity of the MS. The Sentaurus TCAD software simulates the characteristic of the MS. The measured results reveal that the MS sensitivity is 534 mV/T in the x-direction MF, 525 mV/T in the y-direction MF and 119 mV/T in the z-axis MF.
A vector magnetometer based on a single spin-orbit torque anomalous Hall device

Xin Chen,Hang Xie,Haoxuan Shen,Yihong Wu

DOI: https://doi.org/10.1103/PhysRevApplied.18.024010

2022-06-16

Abstract:In many applications, the ability to measure the vector information of a magnetic field with high spatial resolution and low cost is essential, but it is still a challenge for existing magnetometers composed of multiple sensors. Here, we report a single-device based vector magnetometer, which is enabled by spin-orbit torque, capable of measuring a vector magnetic field using the harmonic Hall resistances of a superparamagnetic ferromagnet (FM)/heavy metal (HM) bilayer. Under an ac driving current, the first and second harmonic Hall resistances of the FM/HM bilayer show a linear relationship with the vertical and longitudinal component (along the current direction) of the magnetic field, respectively. By employing a L-shaped Hall device with two orthogonal arms, we can measure all the three field components simultaneously, so as to detect both the amplitude and direction of magnetic field in a three-dimensional space. As proof of concepts, we demonstrate both angular position sensing on the three coordinate planes and vector mapping of magnetic field generated by a permanent magnet, both of which are in good agreement with the simulation results. Crosstalk between vertical and longitudinal field components at large field is discussed using theoretical models.

Mesoscale and Nanoscale Physics,Applied Physics
A Magnetoelectric Compass for In-Plane AC Magnetic Field Detection

Jingen Wu,Zhongqiang Hu,Xiangyu Gao,Miaomiao Cheng,Xinger Zhao,Wei Su,Zhiguang Wang,Ziyao Zhou,Shuxiang Dong,Ming Liu

DOI: https://doi.org/10.1109/tie.2020.2978711

IF: 7.7

2021-04-01

IEEE Transactions on Industrial Electronics

Abstract:Magnetoelectric (ME) composites exhibit high sensitivity for detecting the strength of weak magnetic field. Yet, they are not sensitive to the angle of a randomly orientated in-plane ac magnetic field, since the strain-mediated ME structures merely response to magnetic field along certain direction. In this article, an ME compass for detecting the intensity as well as the orientation of in-plane ac magnetic field is proposed. The ME compass is designed with the barbell-shaped structure, where NdFeB permanent magnets induce compressive stress on piezoelectric components via torque effect, so that the magneto-mechano-electric coupling effect is mediated by stress without dc magnetic bias field. The ME compass reveals a low resonant frequency (<50 Hz) that is favorable for practical applications. The contribution from d<sub>33</sub> piezoelectric coefficient is dominant to the ME effect of the compass, with an ME coefficient of 0.7302 V/cm Oe at resonance. The proposed device presents excellent performance for detecting in-plane ac magnetic field with arbitrary direction, where the sensitivities for intensity and angle are 0.01 Oe and ±0.2°, respectively. Additionally, the barbell-shaped structure brings advantages, such as simple construction, stable performance, and durability, indicating promising applications in angular sensors and compasses.

automation & control systems,engineering, electrical & electronic,instruments & instrumentation
A Position Measurement Method for 3-Degree-of-freedom Motion Based on Magnetic Detection.

Longmin Chen,Jinchun Hu,Yu Zhu,Rong Cheng

DOI: https://doi.org/10.1177/0959651816628730

2016-01-01

Abstract:Generally, optical methods for precision measurement have limitations when rotation of large angle (larger than 10°) and translation of large range occur simultaneously. To deal with the problem, an improved method based on spatial magnetic detection is proposed for planar 3-degree-of-freedom position measurement with large ranges in this article. The position-solving algorithm of the method calculates position by decoupling 3 degrees of freedom with the magnetic flux densities of the inherent magnetic field of the permanent-magnet synchronous planar motor detected by the proposed Hall-sensor array. On the basis of previous work, the calculation approach of decoupling is improved; as a result, the calculations for solving position are simplified. The characteristics of the sensor topology are exploited further, and a new calculation approach of decoupling is introduced to compensate the original one, achieving better robustness to noise. The ability of solving 3-degree-of-freedom position and the robustness to noise and magnetic-field imperfections are evaluated by simulation; the results show that the accuracies of translational and rotational motions are 10 µm scale and 0.1° scale in the case with noise of 0.01% of signal amplitude, while they are 100 µm scale and 10° scale in the case with the magnetic-field imperfections caused by parameter deviations. Comparison experiments with commercial sensors are conducted on a self-developed testing platform to verify the feasibility of the method, and the results show that the method can achieve sensing a large rotational angle and a large translational range with a simple implementation.
Advance of the Micro-Magnetometer Memsmag Research

Jianzhong Yang,Lichao Pan,C. L. Kang,G. Liu,H. J. Li,Z. You,D. H. Ren,Y. C. Tian

DOI: https://doi.org/10.4028/www.scientific.net/amr.60-61.241

2009-01-01

Advanced Materials Research

Abstract:The MEMS fluxgate magnetic sensor which is characterized by its small mass, smart volume, high sensitivity and outstanding temperature stability, is often applied on the measurements of weak magnetic fields, such as the geomagnetic field. Therefore, it is widely utilized in the field of aeronautics and aerospace field, especially in Nano-/Pico- satellites. MEMSMag, a novel type of micro fluxgate magnetic sensor (MFGM), which exploits magnetic fluxgate principle, was designed and microfabricated, Based on MEMS technology. The micro sensor probe has symmetrical geometry, and is flexible for electrical connection. MEMSMag would be easily assembled into a 3-axis subminiature magnetometer and will be applied to measure vector of the weak geomagnetic field. The microfabrication process was developed. The UV lithography technology in combination with thick negative hard-cured technology was exploited in the microfabrication. The original samples were produced with the dimension of 1 1 100 . The primary tests have been done. The integrity, conductivity and resist test, as well as transformer effect measurement were completed. The statistics, analysis and conclusion of the experimental results have been obtained.
Miniature biplanar coils for alkali-metal-vapor magnetometry

Michael C. D. Tayler,Kostas Mouloudakis,Rasmus Zetter,Dominic Hunter,Vito G. Lucivero,Sven Bodenstedt,Lauri Parkkonen,Morgan W. Mitchell

DOI: https://doi.org/10.1103/PhysRevApplied.18.014036

2022-08-11

Abstract:Atomic spin sensors offer precision measurements using compact, microfabricated packages, placing them in a competitive position for both market and research applications. Performance of these sensors such as dynamic range may be enhanced through magnetic field control. In this work, we discuss the design of miniature coils for three-dimensional, localized field control by direct placement around the sensor, as a flexible and compact alternative to global approaches used previously. Coils are designed on biplanar surfaces using a stream-function approach and then fabricated using standard printed-circuit techniques. Application to a laboratory-scale optically pumped magnetometer of sensitivity approximately 20 fT/Hz$^{1/2}$ is shown. We also demonstrate the performance of a coil set measuring $7 \times 17 \times 17$ mm$^3$ that is optimized specifically for magnetoencephalography, where multiple sensors are operated in proximity to one another. Characterization of the field profile using $^{87}$Rb free-induction spectroscopy and other techniques show $>$96% field homogeneity over the target volume of a MEMS vapor cell and a compact stray field contour of approximately 1% at 20 mm from the center of the cell.

Atomic Physics
A Cubic 3-Axis Magnetic Sensor Array for Wirelessly Tracking Magnet Position and Orientation

Chao Hu,Mao Li,Shuang Song,Wan'an Yang,Rui Zhang,Max Q. -H. Meng

DOI: https://doi.org/10.1109/jsen.2009.2035711

IF: 4.3

2010-01-01

IEEE Sensors Journal

Abstract:In medical diagnoses and treatments, e.g., endoscopy, dosage transition monitoring, it is often desirable to wirelessly track an object that moves through the human GI tract. In this paper, we propose a magnetic localization and orientation system for such applications. This system uses a small magnet enclosed in the object to serve as excitation source, so it does not require the connection wire and power supply for the excitation signal. When the magnet moves, it establishes a static magnetic field around, whose intensity is related to the magnet's position and orientation. With the magnetic sensors, the magnetic intensities in some predetermined spatial positions can be detected, and the magnet's position and orientation parameters can be computed based on an appropriate algorithm. Here, we propose a real-time tracking system developed by a cubic magnetic sensor array made of Honeywell 3-axis magnetic sensors, HMC1043. Using some efficient software modules and calibration methods, the system can achieve satisfactory tracking accuracy if the cubic sensor array has enough number of 3-axis magnetic sensors. The experimental results show that the average localization error is 1.8 mm.
Ultrathin All-in-One Spin Hall Magnetic Sensor with Built-In AC Excitation Enabled by Spin Current

Yanjun Xu,Yumeng Yang,Mengzhen Zhang,Ziyan Luo,Yihong Wu

DOI: https://doi.org/10.1002/admt.201800073

IF: 6.8

2018-07-15

Advanced Materials Technologies

Abstract:Magnetoresistance (MR) sensors provide cost‐effective solutions for diverse industrial and consumer applications, including emerging fields such as internet‐of‐things (IoT), artificial intelligence, and smart living. Commercially available MR sensors such as anisotropic magnetoresistance (AMR) sensors, giant magnetoresistance (GMR) sensors, and tunnel magnetoresistance (TMR) sensors typically require an appropriate magnetic bias for both output linearization and noise suppression, resulting in increased structural complexity and manufacturing cost. Here, an all‐in‐one spin Hall magnetoresistance (SMR) sensor with built‐in AC excitation and rectification detection is demonstrated, which effectively eliminates the requirements of any linearization and domain stabilization mechanisms separated from the active sensing layer. This is made possible by the coexistence of SMR and spin–orbit torque (SOT) in ultrathin NiFe/Pt bilayers. Despite the simplest possible structure, the fabricated Wheatstone bridge sensor exhibits essentially zero DC offset, negligible hysteresis, and a detectivity of around 1 nT Hz−1/2 at 1 Hz. In addition, it also shows an angle dependence to external field similar to those of GMR and TMR, though it does not have any reference layer (unlike GMR and TMR). The superior performances of SMR sensors are evidently demonstrated in the proof‐of‐concept experiments on rotation angle measurement, and vibration and finger motion detection. An all‐in‐one spin Hall magnetic sensor that features simplest structure, nearly zero DC offset, negligible hysteresis, and low noise based on AC excitation is demonstrated. A few proof‐of‐concept potential applications including angle, vibration, and finger movement detection are demonstrated. The work opens new possibilities for further exploitation of spin–orbit torque technology in a wide range of applications.

materials science, multidisciplinary

Presbyesophagus: A reappraisal

Three-Axis Vector Magnetometer with a Three-Dimensional Flux Concentrator

Coil misalignment analysis under different radius of coil and wire for Wireless Power Transfer System

Three Dimensional Compensation Spherical Coils for Compact Atomic Magnetometers

Design of CMOS magnetic sensor integrated circuit

Cmos Magnetic Sensor Integrated Circuit with Sectorial Magfet

Development of CMOS-MEMS in-plane magnetic coils for application as a three-axis resonant magnetic sensor

Inverted Pyramid 3-axis Silicon Hall Effect Magnetic Sensor With Offset Cancellation

Development of Multi-Axes CMOS-MEMS Resonant Magnetic Sensor Using Lorentz and Electromagnetic Forces

Out-of-Plane Cmos Compatible Magnetometers

Study on Micro Fluxgate Magnetic Sensor

An Integrated Single-Beam Three-Axis High-Sensitivity Magnetometer

Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique

Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology

A vector magnetometer based on a single spin-orbit torque anomalous Hall device

A Magnetoelectric Compass for In-Plane AC Magnetic Field Detection

A Position Measurement Method for 3-Degree-of-freedom Motion Based on Magnetic Detection.

Advance of the Micro-Magnetometer Memsmag Research

Miniature biplanar coils for alkali-metal-vapor magnetometry

A Cubic 3-Axis Magnetic Sensor Array for Wirelessly Tracking Magnet Position and Orientation

Ultrathin All-in-One Spin Hall Magnetic Sensor with Built-In AC Excitation Enabled by Spin Current