Abstract:This paper presents a novel class of miniature fluxgate magnetometers fabricated on a print circuit board (PCB) substrate and electrically connected to each other similar to the current "flip chip" concept in semiconductor package. This sensor is soldered together by reversely flipping a 5 cm × 3 cm PCB substrate to the other identical one which includes dual magnetic cores, planar pick-up coils, and 3-D excitation coils constructed by planar Cu interconnections patterned on PCB substrates. Principles and analysis of the fluxgate sensor are introduced first, and followed by FEA electromagnetic modeling and simulation for the proposed sensor. Comprehensive characteristic experiments of the miniature fluxgate device exhibit favorable results in terms of sensitivity (or "responsivity" for magnetometers) and field noise spectrum. The sensor is driven and characterized by employing the improved second-harmonic detection technique that enables linear V-B correlation and responsivity verification. In addition, the double magnitude of responsivity measured under very low frequency (1 Hz) magnetic fields is experimentally demonstrated. As a result, the maximum responsivity of 593 V/T occurs at 50 kHz of excitation frequency with the second harmonic wave of excitation; however, the minimum magnetic field noise is found to be 0.05 nT/Hz(1/2) at 1 Hz under the same excitation. In comparison with other miniature planar fluxgates published to date, the fluxgate magnetic sensor with flip chip configuration offers advances in both device functionality and fabrication simplicity. More importantly, the novel design can be further extended to a silicon-based micro-fluxgate chip manufactured by emerging CMOS-MEMS technologies, thus enriching its potential range of applications in modern engineering and the consumer electronics market.

MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets

Advance of the Micro-Magnetometer Memsmag Research

Study on Micro Fluxgate Magnetic Sensor

100pTcm Sensitive MEMS Resonant Magnetometer from a Commercial Accelerometer

High Isolation, Double-Clamped, Magnetoelectric Microelectromechanical Resonator Magnetometer

High Resolution Magnetometer Based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator

Three-Axis Vector Magnetometer with a Three-Dimensional Flux Concentrator

Impact of magnetic domains on magnetic flux concentrators

Out-of-Plane Cmos Compatible Magnetometers

An alternative capacitive transducer design for sensitivity enhancement in MEMS Lorentz force magnetometers

Design and Analyses of a MEMS Based Resonant Magnetometer

High-sensitivity low-noise miniature fluxgate magnetometers using a flip chip conceptual design

Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers

Novel Magnetic Field Modulation Concept Using Multiferroic Heterostructure for Magnetoresistive Sensors.

A magneto-mechanical accelerometer based on magnetic tunnel junctions

Superconducting Quantum Magnetometer Based on Flux Focusing Effect for High-Sensitivity Applications

A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide

Single-structure 3-Axis Lorentz Force Magnetometer Based on an AlN-on-Si MEMS Resonator

Magnetic Flux Concentration Technology Based on Soft Magnets and Superconductors

On-chip scalable optomechanical magnetometers

Highly-Linear Magnet-Free Microelectromechanical Circulators