The Design of the Plane Structure and the Passivation of GMR Spin-Vavle Biosensors

赵复龙,曲炳郡,任天令,刘理天

2010-01-01

Abstract:A series of sensors constructed by one single GMR spin valve stripe with different width was fabricated and measured in this paper. A comparison of their coercivity (H c) , coupled field (H cof) and linear range (H range) indicated that the sensor with a width of 4 μm demonstrated the best performance, for its linear range was on the zero-symmetric, in addition, its coercivity was so small and its linear range was so big that its resistance was basically not affected by weak magnetic field. The design of the passivation layer of the Wheatstone bridge Biosensor, which was constructed by four spin valve strips, adopted the approach by spinning coating of a SU-8 layer on the surface of the biosensor and holing on the specific region of the SU-8 below which was the sensor signal unit of the biosensor. In this way, the sensor can work in the liquid environment successfully and the signal unit and reference unit of the biosensor can be distinguished.