Bright Luminescence in Amorphous Hydrogenated Silicon-Nitride Quantum-Dot Films Prepared by A Special Designed Pecvd System

D. Q. Shi,B. C. Hu,W. Xu,X. N. Li,C. Y. Ma,Q. Y. Zhang
DOI: https://doi.org/10.1016/j.jlumin.2016.02.028
IF: 3.6
2016-01-01
Journal of Luminescence
Abstract:Amorphous hydrogenated silicon-nitride (a-SiNx:H) quantum-dot (QD) films were successfully deposited on Si substrates using a specially designed system of plasma enhanced chemical vapor deposition. The a-SiNx:H QD films exhibit strong visible photoluminescence (PL) with a tunable peak energy ranging from 3.26 to 2.52eV, depending on the deposition pressure. The PL process was studied in terms of temperature-dependent and time-resolved PL spectra in comparison with the theoretical predication of the band-tail luminescence, and then the tunable PL spectra were assigned to the recombination of excitons in the localized states at the band tails of the a-SiNx:H QDs.
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