Visible Photoluminescence in Crystallized Amorphous Sih/Sinxh Multiquantum-Well Structures

KJ CHEN,XF HUANG,X JUN,F DUAN
DOI: https://doi.org/10.1063/1.108309
IF: 4
1992-01-01
Applied Physics Letters
Abstract:Visible photoluminescence has been observed in crystallized a-Si:H/a-SiNx:H multiquantum-well structures at room temperature. The MQW heterostructures consisting of 72 layers were formed by computer controlled plasma-enhanced chemical-vapor deposition method and then crystallized by Ar+ laser annealing technique. The crystallinity and average grain size of the silicon microcrystals were determined by means of Raman and x-ray diffraction spectroscopy. The crystallized samples with well-layer thickness L(s)=40 angstrom showed an intense photoluminescence which is peaked at 2.1 eV with a full width at half-maximum of 0.25 eV. This is consistent with calculations based on the quantum confinement model.
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