Stable Electroluminescence and Its Mechanism in Laser Crystallized A-Si:H/a-sinx:h Superlattices

MX Wang,XF Huang,W Li,J Xu,KJ Chen
DOI: https://doi.org/10.1002/(sici)1521-396x(199805)167:1<125::aid-pssa125>3.0.co;2-3
1998-01-01
Abstract:We report visible and stable electroluminescence (EL) with an emission peak wavelength of 700 nm from laser-crystallized a-Si:H/a-SiNx:H superlattices (SLs) at room temperature. SL samples with an a-Si:H sublayer thickness of 4.0 nm were crystallized by Ar+ laser scanning through a solid phase crystallization process. X-ray diffraction (XRD) and Raman scattering spectra demonstrate that nanocrystalline silicon (nc-Si) was formed within these ultrathin a-Si:H sublayers. EL was obtained in a structure consisting of a semitransparent Au electrode/crystallized SLs/300 nm n(+) a-Si:H/quartz substrate. When the current density in the biased sample reached a threshold value of 5 mA/mm(2), a uniform and stable EL was emitted through the entire semitransparent Au electrode. The light emission is attributed to radiative recombination related to nc-Si contained in the crystallized SLs.
What problem does this paper attempt to address?