A Luminescent Si Quantum Dots Films - Preparation And Characterization

Kj Chen,Xf Huang,Mr Chen,Wh Shi,Zf Li,D Feng
DOI: https://doi.org/10.1117/12.190736
1994-01-01
Abstract:We report two kinds of method for preparing luminescent silicon films with quantum crystallites (QCs) structures: (1) Using laser annealing technique to crystallize ultrathin amorphous silicon layers which were constructed in a-Si:H/a-SiNx:H multiquantum well (MQW) structures. (2) Applying the layer-by-layer deposition technique to the growth of silicon QCs by varying the hydrogen plasma exposure time. The novel structures of these two types of QCs films were characterized by X-ray diffraction and Raman scattering spectroscopy. The room temperature visible photoluminescence (PL) from Si QCs with size of 4 nm or less has been observed in most of samples.
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